Title | An Analytical Electrothermal Model of a 1-D Electrothermal MEMS Micromirror |
Publication Type | Conference Paper |
Year of Publication | 2004 |
Authors | Todd, S., and H. Xie |
Conference Name | SPIE International Symposium on Smart Materials, Nano-, and Micro-Smart Systems |
Date Published | December |
Conference Location | Sydney, Australia |