An Analytical Electrothermal Model of a 1-D Electrothermal MEMS Micromirror

TitleAn Analytical Electrothermal Model of a 1-D Electrothermal MEMS Micromirror
Publication TypeConference Paper
Year of Publication2004
AuthorsTodd, S., and H. Xie
Conference NameSPIE International Symposium on Smart Materials, Nano-, and Micro-Smart Systems
Date PublishedDecember
Conference LocationSydney, Australia