Title | Large volume, high performance electroplated Co-Pt micromagnets for MEMS applications |
Publication Type | Conference Paper |
Year of Publication | 2004 |
Authors | Zana, I., D. P. Arnold, and M. G. Allen |
Conference Name | Electrochemical Processing in ULSI and MEMS (Electrochem. Soc. Proc. Vol. 2004-17) |
Date Published | May |