Large volume, high performance electroplated Co-Pt micromagnets for MEMS applications

TitleLarge volume, high performance electroplated Co-Pt micromagnets for MEMS applications
Publication TypeConference Paper
Year of Publication2004
AuthorsZana, I., D. P. Arnold, and M. G. Allen
Conference NameElectrochemical Processing in ULSI and MEMS (Electrochem. Soc. Proc. Vol. 2004-17)
Date PublishedMay