Design and Characterization of a Micromachined Piezoelectric Microphone

TitleDesign and Characterization of a Micromachined Piezoelectric Microphone
Publication TypeConference Paper
Year of Publication2005
AuthorsHorowitz, S., T. Nishida, L. Cattafesta, and M. Sheplak
Conference Name11th AIAA/CEAS Aeroacoustics Conference, AIAA Paper 2005-2998
Date PublishedMay