| Title | Nonlinear Identification of a Capacitive Dual-Backplate MEMS Microphone |
| Publication Type | Conference Paper |
| Year of Publication | 2005 |
| Authors | Liu, J., D. Martin, K. Kadirvel, T. Nishida, M. Sheplak, and B. Mann |
| Conference Name | 2005 ASME International Design Engineering Technical Conferences, Paper DETC2005-84591 |
| Date Published | September |
| Conference Location | Long Beach, CA |
