| Title | Nonlinear System Identification of a MEMS Dual-Backplate Capacitive Microphone by Harmonic Balance Method |
| Publication Type | Conference Paper |
| Year of Publication | 2005 |
| Authors | Liu, J., D. Martin, K. Kadirvel, T. Nishida, L. Cattafesta, M. Sheplak, and B. Mann |
| Conference Name | 2005 ASME International Mechanical Engineering Congress and Exposition, Paper IMECE2005-82880 |
| Date Published | November |
| Conference Location | Orlando, FL |
