Design of a MEMS Piezoresistive Microphone for use in Aeroacoustic Measurements

TitleDesign of a MEMS Piezoresistive Microphone for use in Aeroacoustic Measurements
Publication TypeConference Paper
Year of Publication2007
AuthorsHomeijer, B., L. Cattafesta, T. Nishida, and M. Sheplak
Conference Name13th AIAA/CEAS Aeroacoustics Conference and Exhibit
Date PublishedMay
Conference LocationRome, Italy