A Micromachined Piezoelectric Microphone for Aeroacoustics Applications

TitleA Micromachined Piezoelectric Microphone for Aeroacoustics Applications
Publication TypeConference Paper
Year of Publication2006
AuthorsHorowitz, S., T. Nishida, L. Cattafesta, and M. Sheplak
Conference NameSolid-State Sensor, Actuator and Microsystems Workshop
Date PublishedJune
Conference LocationHilton Head, SC