Title | A Micromachined Piezoelectric Microphone for Aeroacoustics Applications |
Publication Type | Conference Paper |
Year of Publication | 2006 |
Authors | Horowitz, S., T. Nishida, L. Cattafesta, and M. Sheplak |
Conference Name | Solid-State Sensor, Actuator and Microsystems Workshop |
Date Published | June |
Conference Location | Hilton Head, SC |