Modeling and optimization of a side-implanted piezoresistive shear stress sensor

TitleModeling and optimization of a side-implanted piezoresistive shear stress sensor
Publication TypeConference Paper
Year of Publication2006
AuthorsLi, Y., M. Papila, T. Nishida, L. Cattafesta, and M. Sheplak
Conference NameProceeding of SPIE 13th Annual International Symposium on Smart Structures and Materials, Paper 6174-7
Date PublishedFebruary
Conference LocationSan Diego, CA