Progress towards a micromachined thermoelectric generator using PbTe and PbSnSeTe thin films

TitleProgress towards a micromachined thermoelectric generator using PbTe and PbSnSeTe thin films
Publication TypeConference Paper
Year of Publication2006
AuthorsBoniche, I., C. D. Meyer, P. Taylor, N. Dhar, and D. P. Arnold
Conference NameTech. Dig. 6th Int. Workshop Micro Nanotechnology For Power Generation and Energy Conversion Apps. (PowerMEMS 2006)
Date PublishedNovember
Conference LocationBerkeley, CA
Abstract

This paper presents etching techniques and metal contact resistance studies for vapor-deposited PbTe and PbSnSeTe films to enable micromachining of thermoelectric (TE) generators within integrated MEMS devices (e.g. micro heat engines, microcombustors). Films of up to 10