| Title | Progress towards a micromachined thermoelectric generator using PbTe and PbSnSeTe thin films |
| Publication Type | Conference Paper |
| Year of Publication | 2006 |
| Authors | Boniche, I., C. D. Meyer, P. Taylor, N. Dhar, and D. P. Arnold |
| Conference Name | Tech. Dig. 6th Int. Workshop Micro Nanotechnology For Power Generation and Energy Conversion Apps. (PowerMEMS 2006) |
| Date Published | November |
| Conference Location | Berkeley, CA |
| Abstract | This paper presents etching techniques and metal contact resistance studies for vapor-deposited PbTe and PbSnSeTe films to enable micromachining of thermoelectric (TE) generators within integrated MEMS devices (e.g. micro heat engines, microcombustors). Films of up to 10 |
