Microfabrication of a wall shear stress sensor using side-implanted piezoresistive tethers

TitleMicrofabrication of a wall shear stress sensor using side-implanted piezoresistive tethers
Publication TypeConference Paper
Year of Publication2007
AuthorsLi, Y., T. Nishida, D. P. Arnold, and M. Sheplak
Conference NameProceeding of SPIE 14th Annual International Symposium on Smart Structures and Materials, Paper No.6529-13
Date PublishedMay
Conference LocationSan Diego, CA