Title | Microfabrication of a wall shear stress sensor using side-implanted piezoresistive tethers |
Publication Type | Conference Paper |
Year of Publication | 2007 |
Authors | Li, Y., T. Nishida, D. P. Arnold, and M. Sheplak |
Conference Name | Proceeding of SPIE 14th Annual International Symposium on Smart Structures and Materials, Paper No.6529-13 |
Date Published | May |
Conference Location | San Diego, CA |