Title | A method to form bonded micromagnets embedded in silicon |
Publication Type | Conference Paper |
Year of Publication | 2007 |
Authors | Bowers, B., J. Agashe, and D. P. Arnold |
Conference Name | Proc. 14th Int. Conf. Solid-State Sensors, Actuators, and Microsystems (Transducers 07) |
Date Published | June |
Abstract | {In this work, samarium cobalt (SmCo) powder is utilized for the fabrication of micromagnetic structures embedded in silicon wafers. The fabrication process involves the dry packing of raw, magnetic powder (mean particle diameter of 5-10 |
URL | http://dx.doi.org/10.1109/SENSOR.2007.4300450 |
DOI | 10.1109/SENSOR.2007.4300450 |