Design of a tubular microfabricated power generation system for hot exhaust streams

TitleDesign of a tubular microfabricated power generation system for hot exhaust streams
Publication TypeConference Paper
Year of Publication2007
AuthorsMasilamani, S., I. Boniche, C. D. Meyer, R. Durscher, and D. P. Arnold
Conference NameTech. Dig. 7th Int. Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2007)
Date PublishedNovember
Conference LocationFreiburg, Germany
Abstract

This paper presents the preliminary design, modeling, and fabrication efforts for a micromachined thermoelectric power generator to be powered by hot exhaust gases from a small heat engine or fuel cell. The proposed tubular generator is envisioned by stacking multiple TE chip modules, each having radially-oriented thermoelements that extend between silicon fin arrays and are supported by a polyimide membrane. A prototype multi-module stack was fabricated and was experimentally shown to sustain a 36