An Electrothermal Micromirror with High Linear Scanning Efficiency

TitleAn Electrothermal Micromirror with High Linear Scanning Efficiency
Publication TypeConference Paper
Year of Publication2007
AuthorsPal, S., K. Jia, and H. Xie
Conference NameLEOS 2007
Date PublishedOctober
Conference LocationLake Buena Vista, FL