A Large Aperture, Piston-Tip-Tilt Micromirror for Optical Phase Array Applications

TitleA Large Aperture, Piston-Tip-Tilt Micromirror for Optical Phase Array Applications
Publication TypeConference Paper
Year of Publication2008
AuthorsWu, L., S. Maley, S. Dooley, T.R. Nelson, P. F. McManamon, and H. Xie
Conference NameIEEE MEMS 2008
Date PublishedJanuary
Conference LocationTucson, AZ
Abstract

This paper reports the design, fabrication and characterization of a 4