Title | A Large Aperture, Piston-Tip-Tilt Micromirror for Optical Phase Array Applications |
Publication Type | Conference Paper |
Year of Publication | 2008 |
Authors | Wu, L., S. Maley, S. Dooley, T.R. Nelson, P. F. McManamon, and H. Xie |
Conference Name | IEEE MEMS 2008 |
Date Published | January |
Conference Location | Tucson, AZ |
Abstract | This paper reports the design, fabrication and characterization of a 4 |