| Title | A laterally-implanted piezoresistive skin-friction sensor |
| Publication Type | Conference Paper |
| Year of Publication | 2008 |
| Authors | Li, Y., V. Chandrasekharan, B. Bertolucci, T. Nishida, L. Cattafesta, D. P. Arnold, and M. Sheplak |
| Conference Name | Solid-State Sensors, Actuators, and Microsystems Workshop |
| Date Published | June |
| Conference Location | Hilton Head, SC |
| Abstract | This paper presents the packaging, fabrication, and calibration of a piezoresistive skin-friction sensor for the direct measurement of wall shear stress. The floating-element structure integrates laterally-implanted piezoresistors into the ether sidewalls to form a fully active Wheatstone bridge for electromechanical transduction. Experimental characterization at a bias voltage of 1.5 Vindicates a sensitivity of 4.24 / |
