A laterally-implanted piezoresistive skin-friction sensor

TitleA laterally-implanted piezoresistive skin-friction sensor
Publication TypeConference Paper
Year of Publication2008
AuthorsLi, Y., V. Chandrasekharan, B. Bertolucci, T. Nishida, L. Cattafesta, D. P. Arnold, and M. Sheplak
Conference NameSolid-State Sensors, Actuators, and Microsystems Workshop
Date PublishedJune
Conference LocationHilton Head, SC

This paper presents the packaging, fabrication, and calibration of a piezoresistive skin-friction sensor for the direct measurement of wall shear stress. The floating-element structure integrates laterally-implanted piezoresistors into the ether sidewalls to form a fully active Wheatstone bridge for electromechanical transduction. Experimental characterization at a bias voltage of 1.5 Vindicates a sensitivity of 4.24 /