Title | Part-to-Part and Part-to-Substarte Magnetic Self-Assembly of Millimeter Scale Components with Angular Orientation |
Publication Type | Conference Paper |
Year of Publication | 2009 |
Authors | Shetye, S., I. Eskinazi, and D. P. Arnold |
Conference Name | Tech. Dig. 22nd IEEE Int. Conf. MicroElectro Mechanical Systems (MEMS 2009) |
Date Published | January |
Conference Location | Sorrento, Italy |
Abstract | This paper presents multifunctional self-assembly of millimeter scale components using magnetic forces between permanent micromagnets integrated on the component surfaces. Part-to-part assembly is demonstrated by batch assembly of free-floating 1mm x 1mm x 0.5mm silicon parts in a liquid environment with the assembly yield varying from 88% to 90%. Part-to-substrate assembly is demonstrated by assembling an ordered array on a substrate in a dry environment with the assembly yield varying from 87% to 98%. In both cases, diverse magnetic shapes/patterns are used to control the alignment and angular orientation of the components and assembly times range from 15 |