Part-to-Part and Part-to-Substarte Magnetic Self-Assembly of Millimeter Scale Components with Angular Orientation

TitlePart-to-Part and Part-to-Substarte Magnetic Self-Assembly of Millimeter Scale Components with Angular Orientation
Publication TypeConference Paper
Year of Publication2009
AuthorsShetye, S., I. Eskinazi, and D. P. Arnold
Conference NameTech. Dig. 22nd IEEE Int. Conf. MicroElectro Mechanical Systems (MEMS 2009)
Date PublishedJanuary
Conference LocationSorrento, Italy
Abstract

This paper presents multifunctional self-assembly of millimeter scale components using magnetic forces between permanent micromagnets integrated on the component surfaces. Part-to-part assembly is demonstrated by batch assembly of free-floating 1mm x 1mm x 0.5mm silicon parts in a liquid environment with the assembly yield varying from 88% to 90%. Part-to-substrate assembly is demonstrated by assembling an ordered array on a substrate in a dry environment with the assembly yield varying from 87% to 98%. In both cases, diverse magnetic shapes/patterns are used to control the alignment and angular orientation of the components and assembly times range from 15