Title | Design, Modeling and Simulation of a Closed-Loop Controller for a Dual Backplate MEMS Capacitive Microphone |
Publication Type | Conference Paper |
Year of Publication | 2007 |
Authors | Kadirvel, K., D. Martin, J. Liu, R. M. Fox, M. Sheplak, L. Cattafesta, and T. Nishida |
Conference Name | 6th IEEE Conference on Sensors |
Date Published | October |
Conference Location | Atlanta, GA |