| Title | Electroplated metal microstructures embedded in fusion-bonded silicon: conductors and magnetic materials |
| Publication Type | Journal Article |
| Year of Publication | 2004 |
| Authors | Arnold, D. P., F. Cros, I. Zana, D. Veazie, and M. G. Allen |
| Journal | J. Microelectromech. Syst. |
| Volume | 13 |
| Pagination | 791-798 |
| Date Published | OCT |
| URL | http://dx.doi.org/10.1109/JMEMS.2004.835770 |
| DOI | 10.1109/JMEMS.2004.835770 |
