Title | Source of Excess Noise in Silicon Piezoresistive Microphones |
Publication Type | Journal Article |
Year of Publication | 2006 |
Authors | Dieme, R., G. Bosman, M. Sheplak, and T. Nishida |
Journal | J. Acoustical Society of America |
Volume | 119 |
Pagination | 2710-2720 |
Date Published | MAY |
URL | http://dx.doi.org/10.1121/1.2188367 |
DOI | 10.1121/1.2188367 |