Title | Uniaxial Process Induced Strained Si: Extending the CMOS Roadmap |
Publication Type | Journal Article |
Year of Publication | 2006 |
Authors | Thompson, S., G-Y. Sun, Y. Choi, and T. Nishida |
Journal | IEEE Trans. Electron Dev. |
Volume | 53 |
Pagination | 1010-1020 |
Date Published | MAY |
URL | http://dx.doi.org/10.1109/TED.2006.872088 |
DOI | 10.1109/TED.2006.872088 |