Title | Magnetic induction machines integrated into bulk-micromachined silicon |
Publication Type | Journal Article |
Year of Publication | 2006 |
Authors | Arnold, D. P., S. Das, F. Cros, I. Zana, J. H. Lang, and M. G. Allen |
Journal | J. Microelectromech. Syst. |
Volume | 15 |
Pagination | 406-414 |
Date Published | APR |
URL | http://dx.doi.org/10.1109/JMEMS.2006.873951 |
DOI | 10.1109/JMEMS.2006.873951 |