Title | Piezoresistive Microphone Design Pareto Optimization: Tradeoff between Sensitivity and Noise Floor |
Publication Type | Journal Article |
Year of Publication | 2006 |
Authors | Papila, M., R. T. Haftka, T. Nishida, and M. Sheplak |
Journal | J. Microelectromechanical Systems |
Volume | 15 |
Pagination | 1632-1643 |
Date Published | DEC |
URL | http://dx.doi.org/10.1109/JMEMS.2006.883884 |
DOI | 10.1109/JMEMS.2006.883884 |