| Title | A MEMS Acoustic Energy Harvester |
| Publication Type | Journal Article |
| Year of Publication | 2006 |
| Authors | Horowitz, S., M. Sheplak, L. Cattafesta, and T. Nishida |
| Journal | J. Micromech. Microeng. |
| Volume | 16 |
| Pagination | S174-S181 |
| Date Published | SEP |
| Abstract | This paper presents the development of a micromachined acoustic energy harvester for aeroacoustic applications. The acoustic energy harvester employs a silicon-micromachined circular, piezoelectric composite diaphragm for electroacoustic transduction. Lumped element modeling, design, fabrication and characterization of a micromachined acoustic energy harvester prototype are presented. Experimental results indicate a maximum output power density of 0.34 |
| URL | http://dx.doi.org/10.1088/0960-1317/16/9/S02 |
| DOI | 10.1088/0960-1317/16/9/S02 |
