| Title | Development of a micromachined piezoelectric microphone for aeroacoustics applications |
| Publication Type | Journal Article |
| Year of Publication | 2007 |
| Authors | Horowitz, S., T. Nishida, L. Cattafesta, and M. Sheplak |
| Journal | J. Acoust. Soc. Am. |
| Volume | 122 |
| Pagination | 3428-3436 |
| Date Published | DEC |
| Abstract | This paper describes the design, fabrication, and characterization of a bulk-micromachined piezoelectric microphone for aeroacoustic applications. Microphone design was accomplished through a combination of piezoelectric composite plate theory and lumped element modeling. The device consists of a 1.80-mm-diam, 3- |
| URL | http://dx.doi.org/10.1121/1.2785040 |
| DOI | 10.1121/1.2785040 |
