Title | Process development and material characterization of polycrystalline Bi2Te3, PbTe, and PbSnSeTe thin films on silicon for millimeter-scale thermoelectric generators |
Publication Type | Journal Article |
Year of Publication | 2008 |
Authors | Boniche, I., B. C. Morgan, P. Taylor, C. D. Meyer, and D. P. Arnold |
Journal | J. Vacuum Sci. Tech. A |
Volume | 26 |
Pagination | 739-744 |
Date Published | JUL |
Abstract | In this work, deposition, patterning, and metallization of vapor-deposited polycrystalline thermoelectric (TE) thin films of Bi2Te3, PbTe, and PbSnSeTe on silicon (Si) substrates are investigated. These fundamental microfabrication methods are intended for use in integrating TE films into thermally-powered MEMS-based power generators. P-type polycrystalline Bi2Te3, PbTe, and PbSnSeTe films were successfully deposited on thermally oxidized (100) Si substrates to thicknesses ranging from 0.4 |
URL | http://dx.doi.org/10.1116/1.2841522 |
DOI | 10.1116/1.2841522 |