| Title | Oxide field and thickness dependence of trap generation in 9-30 nm dry and dry/wet/dry oxides |
| Publication Type | Journal Article |
| Year of Publication | 1991 |
| Authors | Nishida, T., and S. Thompson |
| Journal | Journal of Applied Physics |
| Volume | 69 |
| Pagination | 3986-3994 |
| Date Published | DEC |
| DOI | 10.1063/1.348914 |
