| Title | Hydrogenation of boron in silicon during low temperature gas and liquid phase processing |
| Publication Type | Journal Article |
| Year of Publication | 1994 |
| Authors | Filangeri, E., and T. Nishida |
| Journal | Journal of Applied Physics |
| Volume | 76 |
| Pagination | 332-335 |
| Date Published | JUL |
| DOI | 10.1063/1.357149 |
