| Title | Impact of mechanical stress on direct and trap-assisted gate leakage currents in p-type silicon metal-oxide-semiconductor capacitors |
| Publication Type | Journal Article |
| Year of Publication | 2008 |
| Authors | Choi, Y., T. Nishida, and S. Thompson |
| Journal | Appl. Phys. Lett. |
| Volume | 92 |
| Pagination | 173507-1–173507-3 |
| Date Published | APR |
| DOI | 10.1063/1.2917717 |
