Comparison between high-field piezoresistive coefficients of Si metal-oxide-semiconductor field-effect transistors and bulk Si under uniaxial and biaxial stress

TitleComparison between high-field piezoresistive coefficients of Si metal-oxide-semiconductor field-effect transistors and bulk Si under uniaxial and biaxial stress
Publication TypeJournal Article
Year of Publication2008
AuthorsChu, M., T. Nishida, X. Lu, N. Mohta, and S. Thompson
JournalJ. Appl. Phys.
Volume103
Pagination113704-1–113704-7
Date PublishedJUN
DOI10.1063/1.2936890