Title | Comparison between high-field piezoresistive coefficients of Si metal-oxide-semiconductor field-effect transistors and bulk Si under uniaxial and biaxial stress |
Publication Type | Journal Article |
Year of Publication | 2008 |
Authors | Chu, M., T. Nishida, X. Lu, N. Mohta, and S. Thompson |
Journal | J. Appl. Phys. |
Volume | 103 |
Pagination | 113704-1–113704-7 |
Date Published | JUN |
DOI | 10.1063/1.2936890 |