Title | An electrothermal micromirror with dual reflective surfaces for circumferential scanning endoscopic imaging |
Publication Type | Journal Article |
Year of Publication | 2009 |
Authors | Wu, L., and H. Xie |
Journal | Journal of Micro/Nanolithography, MEMS, and MOEMS |
Volume | 8 |
Pagination | 013030 |
Date Published | MAR |
Abstract | We report the design, fabrication, and measurements of a dual-reflective, single-crystal silicon-based micromirror that can perform circumferential scanning for endoscopic optical coherence tomography (EOCT). Full 360-deg optical scan angle (OSA) can be achieved by using a dual-reflective mirror with |
DOI | 10.1117/1.3082186 |