An electrothermal micromirror with dual reflective surfaces for circumferential scanning endoscopic imaging

TitleAn electrothermal micromirror with dual reflective surfaces for circumferential scanning endoscopic imaging
Publication TypeJournal Article
Year of Publication2009
AuthorsWu, L., and H. Xie
JournalJournal of Micro/Nanolithography, MEMS, and MOEMS
Volume8
Pagination013030
Date PublishedMAR
Abstract

We report the design, fabrication, and measurements of a dual-reflective, single-crystal silicon-based micromirror that can perform circumferential scanning for endoscopic optical coherence tomography (EOCT). Full 360-deg optical scan angle (OSA) can be achieved by using a dual-reflective mirror with

DOI10.1117/1.3082186