Fully batch-fabricated MEMS magnetic vibrational energy harvesters

TitleFully batch-fabricated MEMS magnetic vibrational energy harvesters
Publication TypeConference Paper
Year of Publication2009
AuthorsWang, N., and D. P. Arnold
Conference NameTech. Dig. 9th Int. Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Apps. (PowerMEMS 2009)
Date PublishedDecember
Conference LocationWashington, DC

This paper reports the fabrication and characterization of fully-integrated, fully-batch-microfabricated electromagnetic vibrational energy harvesters. The 4 – 15 mm3 structures utilize embedded NdFeB powder micromagnet technology, and represent some of the smallest magnetic energy harvesters demonstrated to date. Of three different designs, the best performing demonstrated 13.2 μVrms at the device resonance of 530 Hz and 1 g (9.8 m/s2) excitation. This corresponds to a predicted maximum output power of 23 pW and a normalized power density of 1.6 ×10-9 W/cm3·g2. While the power from these prototype devices is limited, ongoing design and fabrication improvements aim to increase their performance

Refereed DesignationRefereed