| Title | An electromagnetically actuated microspeaker with fully-integrated wax-bonded Nd–Fe–B micromagnets for hearing aid applications |
| Publication Type | Conference Paper |
| Year of Publication | 2009 |
| Authors | Je, S. - S., N. Wang, H. C. Brown, D. P. Arnold, and J. Chae |
| Conference Name | 15th Int. Conf. Solid-State Sensors, Actuators, and Microsystems (Transducers 2009) |
| Date Published | 06/2009 |
| Conference Location | Denver, CO |
| Abstract | We present a fully-integrated, electromagnetically actuated microspeaker intended for hearing aid applications. The microspeaker uses the Lorentz force to actuate multi-turn, multi-layer copper coils embedded in a 3-mm-diameter parylene diaphragm. Process-compatible micromachined permanent magnets are employed for size reduction and batch-manufacturability. The permanent magnets are composed of micro-size Nd |
