Characterization of a MEMS-Based Floating Element Shear Stress Sensor

TitleCharacterization of a MEMS-Based Floating Element Shear Stress Sensor
Publication TypeConference Paper
Year of Publication2009
AuthorsChandrasekharan, V., J. Sells, D. P. Arnold, and M. Sheplak
Conference Name47th AIAA Aerospace Sciences Meeting and Exhibit
Date Published01/2009
Conference LocationOrlando, FL
Other NumbersAIAA Paper 2009-316

A microelectromechanical systems (MEMS)-based capacitive floating element shear stress sensor, developed for time-resolved turbulence measurement, is dynamically characterized via Stokes layer excitation. The floating element structure incorporates interdigitated comb fingers forming differential capacitors, which provide electrical output proportional to the floating element deflection. Preliminary sensor characterization reveals a bandwidth of 6.1 kHz and a sensitivity of 23mV/Pa at 4.2 kHz up to the testing limit of 1.1 Pa (bias voltage of 10 V). The sensor performance surpasses previously reported direct MEMS shear stress sensors with a largest dynamic range (>100 dB) and the lowest noise floor (4.9