Title | Kinematically Stabilized Microbubble Actuator Arrays |
Publication Type | Journal Article |
Year of Publication | 2008 |
Authors | Wu, X., G. Yuan, Y.K. Yoon, and M. G. Allen |
Journal | Journal of Microelectromechanical Systems |
Volume | 17 |
Issue | 1 |
Pagination | 124 - 132 |
Date Published | 02/2008 |
ISSN | 1057-7157 |
DOI | 10.1109/JMEMS.2007.911868 |
Short Title | J. Microelectromech. Syst. |