A parametric dynamic compact thermal model of an electrothermally actuated micromirror

A compact thermal model of a one-dimensional (1D) electrothermally actuated micromirror device is reported. Thermal bimorphs with integrated platinum resistors are used for generating angular rotation. A finite element thermal model is built and validated using thermal imaging data. Using a Krylov subspace-based algorithm, a reduced-order model of order 2 is extracted from the finite element model. The reduced model agrees well with finite element results. A lumped element circuit model is used to explain the second-order thermal response.