A parametric dynamic compact thermal model of an electrothermally actuated micromirror

TitleA parametric dynamic compact thermal model of an electrothermally actuated micromirror
Publication TypeJournal Article
Year of Publication2009
AuthorsPal, S., and H. Xie
JournalJournal of Micromechanics and Microengineering
Volume19
Pagination065007
Abstract

A compact thermal model of a one-dimensional (1D) electrothermally actuated micromirror device is reported. Thermal bimorphs with integrated platinum resistors are used for generating angular rotation. A finite element thermal model is built and validated using thermal imaging data. Using a Krylov subspace-based algorithm, a reduced-order model of order 2 is extracted from the finite element model. The reduced model agrees well with finite element results. A lumped element circuit model is used to explain the second-order thermal response.

URLhttp://stacks.iop.org/0960-1317/19/i=6/a=065007
DOI10.1088/0960-1317/19/6/065007