Title | A tunable microlens with 0.9 mm scan range and small lateral shift |
Publication Type | Conference Paper |
Year of Publication | 2009 |
Authors | Wu, L., and H. Xie |
Conference Name | Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on |
Keywords | assembled glass lenses, biomedical imaging, electric actuators, electrothermally-actuated microlens scanner, lateral shift, microlenses, optical design techniques, optical fabrication, optical scanners, optical tuning, tunable microlens, vertical actuation |
DOI | 10.1109/OMEMS.2009.5338591 |