A tunable microlens with 0.9 mm scan range and small lateral shift

TitleA tunable microlens with 0.9 mm scan range and small lateral shift
Publication TypeConference Paper
Year of Publication2009
AuthorsWu, L., and H. Xie
Conference NameOptical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
Keywordsassembled glass lenses, biomedical imaging, electric actuators, electrothermally-actuated microlens scanner, lateral shift, microlenses, optical design techniques, optical fabrication, optical scanners, optical tuning, tunable microlens, vertical actuation
DOI10.1109/OMEMS.2009.5338591