An Agile Tip-Tilt-Piston Micromirror With Large Aperture, Large Scanning Range and Low Driving Voltage

TitleAn Agile Tip-Tilt-Piston Micromirror With Large Aperture, Large Scanning Range and Low Driving Voltage
Publication TypeConference Paper
Year of Publication2008
AuthorsJia, K., S. Pal, and H. Xie
Conference NameHilton Head 2008, Technical Digest pp. 284-287