Title | An Agile Tip-Tilt-Piston Micromirror With Large Aperture, Large Scanning Range and Low Driving Voltage |
Publication Type | Conference Paper |
Year of Publication | 2008 |
Authors | Jia, K., S. Pal, and H. Xie |
Conference Name | Hilton Head 2008, Technical Digest pp. 284-287 |