Title | A Tip-Tilt-Piston Micromirror Array for Optical Phased Array Applications |
Publication Type | Journal Article |
Year of Publication | 2010 |
Authors | Wu, L., S. Dooley, E. A. Watson, P. F. McManamon, and H. Xie |
Journal | Journal of Microelectromechanical Systems |
Date Published | 2010 |
ISSN | 1941-0158 |
DOI | 10.1109/JMEMS.2010.2076777 |
Short Title | J. Microelectromech. Syst. |