Localized Growth of Carbon Nanotubes on CMOS Substrate at Room Temperature Using Maskless Post-CMOS Processing

TitleLocalized Growth of Carbon Nanotubes on CMOS Substrate at Room Temperature Using Maskless Post-CMOS Processing
Publication TypeJournal Article
Year of Publication2009
AuthorsZhou, Y., J. Johnson, A. Ural, and H. Xie
JournalIEEE Transactions on Nanotechnology
Date Published2009
ISSN1536-125X
DOI10.1109/TNANO.2009.2037757
Short TitleIEEE Trans. Nanotechnology