Title | A large-aperture, piston-tip-tilt micromirror for optical phase array applications |
Publication Type | Conference Paper |
Year of Publication | 2008 |
Authors | Wu, L., S. Maley, S. Dooley, T.R. Nelson, P. F. McManamon, and H. Xie |
Conference Name | 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems2008 IEEE 21st International Conference on Micro Electro Mechanical Systems |
Publisher | IEEE |
Conference Location | Tucson, AZ, USA |
ISBN Number | 978-1-4244-1793-3 |
DOI | 10.1109/MEMSYS.2008.4443766 |