A large-aperture, piston-tip-tilt micromirror for optical phase array applications

TitleA large-aperture, piston-tip-tilt micromirror for optical phase array applications
Publication TypeConference Paper
Year of Publication2008
AuthorsWu, L., S. Maley, S. Dooley, T.R. Nelson, P. F. McManamon, and H. Xie
Conference Name2008 IEEE 21st International Conference on Micro Electro Mechanical Systems2008 IEEE 21st International Conference on Micro Electro Mechanical Systems
PublisherIEEE
Conference LocationTucson, AZ, USA
ISBN Number978-1-4244-1793-3
DOI10.1109/MEMSYS.2008.4443766