| Title | A single-crystal silicon micromirror for large bi-directional 2D scanning applications |
| Publication Type | Journal Article |
| Year of Publication | 2006 |
| Authors | Jain, A., and H. Xie |
| Journal | Sensors and Actuators A: Physical |
| Volume | 130-131 |
| Pagination | 454 - 460 |
| Date Published | 08/2006 |
| ISSN | 09244247 |
| Keywords | Bi-directional scanning; Electrothermal actuation; Large rotation angle; Large vertical displacement; Optical scanner; Two-dimensional (2D) micromirror |
| Abstract | This paper reports the design, fabrication and operation of a two-dimensional (2D) micromirror that can generate large bi-directional scans at low actuation voltages. This single-crystal silicon (SCS) micromirror device has been fabricated by using a unique DRIE CMOS-MEMS process that can simultaneously provide thin-film and SCS microstructures. A fabricated micromirror has negligible initial tilt angle, and can perform large bi-directional 2D optical scans (over ±30°) at less than 12 V dc. 2D dynamic scanning using this mirror has been demonstrated by obtaining a 14° × 50° angular raster scan pattern. This device can also perform vertical displacements up to 0.5 mm at about 15 V dc. |
| URL | http://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6THG-4HMNFYD-1&_user=2139813&_coverDate=08/14/2006&_rdoc=1&_fmt=high&_orig=search&_origin=search&_sort=d&_docanchor=&view=c&_acct=C000054276&_version=1&_urlVersion=0&_userid=2139813&md5=0a448309433 |
| DOI | 10.1016/j.sna.2005.10.030 |
| Short Title | Sensors and Actuators A: Physical |
