| Title | MEMS Mirrors Based on Curved Concentric Electrothermal Actuators with Very Small Lateral Shift and Tilt |
| Publication Type | Conference Paper |
| Year of Publication | 2011 |
| Authors | Liu, L., S. Pal, and H. Xie |
| Conference Name | Transducers'11, The 16th International Conference on Solid-State Sensors, Actuators and Microsystems |
| Date Published | 06/2011 |
| Conference Location | Beijing |
