Batch-fabricated electrodynamic microactuators with integrated micromagnets

This paper reports the fabrication and characterization of two fully batch-fabricated electrodynamic microactuators. The actuators utilize wax-bonded Nd-Fe-B powder magnets and electroplated copper coils for electrodynamic actuation out of plane. A cantilever-type microactuator achieves a 2.66 µm vertical deflection at a driving current of 7.8 mArms at 100 Hz. A piston-type actuator with elastomeric membrane obtained a 1.17 µm vertical displacement at a driving current of 19.1 mArms at 100 Hz.  These microactuators demonstrate the integrability of wax-bonded Nd–Fe–B powder magnets into microscale electromechanical transducers.