| Title | Fabrication of Microscale Rotating Magnetic Machines |
| Publication Type | Book Chapter |
| Year of Publication | 2009 |
| Authors | Arnold, D. P., and M. G. Allen |
| Editor | Lang, J. H. |
| Book Title | Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines |
| Pagination | 157-190 |
| Publisher | Springer |
| City | New York |
| Abstract | In this chapter, microfabrication techniques are discussed to enable miniaturized magnetic machines for use with silicon microturbomachinery. These rotational machines could be used as either motors (for motoring or fluidic pumping) or as generators for electrical power generation. Challenges and methods for microfabricating microscale magnetic machines are described, and examples of previously implemented devices are discussed. |
| DOI | 10.1007/978-0-387-77747-4_5 |
