Fabrication of Microscale Rotating Magnetic Machines

TitleFabrication of Microscale Rotating Magnetic Machines
Publication TypeBook Chapter
Year of Publication2009
AuthorsArnold, D. P., and M. G. Allen
EditorLang, J. H.
Book TitleMulti-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines
CityNew York

In this chapter, microfabrication techniques are discussed to enable miniaturized magnetic machines for use with silicon microturbomachinery. These rotational machines could be used as either motors (for motoring or fluidic pumping) or as generators for electrical power generation. Challenges and methods for microfabricating microscale magnetic machines are described, and examples of previously implemented devices are discussed.