Additive Processes for Metals

TitleAdditive Processes for Metals
Publication TypeBook Chapter
Year of Publication2011
AuthorsArnold, D. P., Y.K. Yoon, and M. Saumer
Book TitleMEMS Materials and Processes Handbook
CityNew York

Metals are vital building blocks for MEMS. Pure metals and metal alloys are employed in microsystem design to achieve a wide array of functionality. Common examples include electrical conductors, mechanical structures, magnetic elements, thermal conductors, optical reflectors, and more. In this chapter, additive processes for metals are discussed in the context of their application in MEMS. Particular attention is paid to MEMS-centric processing technologies, where thick metal layers are often required. Basic guidelines are given for material selection, and fabrication recipes are provided as a starting point for process development.