|Title||Fabrication and Electrical Characterization of Microscale Dielectric Barrier Discharge Devices|
|Publication Type||Conference Paper|
|Year of Publication||2010|
|Authors||Zito, J., and D. P. Arnold|
|Conference Name||Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head)|
|Conference Location||Hilton Head, SC|
|Keywords||dielectric barrier discharge, plasma|
In this paper we report the microfabrication and electrical characterization of microscale dielectric barrier discharge (DBD) plasma devices on glass substrates. The devices employ Au electrodes (5 mm long, ≤ 40 μm wide) separated by a polyimide dielectric (10 µm or 50 µm thick). Under ac sinusoidal excitation at 14 kHz, the plasma discharges ignite around 1 kVpk input amplitude. The power consumption of a single device is on the order of 3 – 6 mW/mm and power delivery is found to increase linearly when multiple devices are connected in parallel. The effective plasma load impedance is extracted from the measured voltage/current waveforms, and the parameters for a parallel R-C load model are computed. Since most of the tested devices sustained plasma for only a few minutes before failure, reliability of the devices is also briefly discussed.