Title | Effects of Fabrication Process Parameters on the Properties of Cyclic Olefin Copolymer Microfluidic Devices |
Publication Type | Journal Article |
Year of Publication | 2006 |
Authors | Fredrickson, C. K., Z. Xia, C. Das, R. Ferguson, F.T. Tavares, and H. Z. Fan |
Journal | Journal of Microelectromechanical Systems |
Volume | 15 |
Issue | 5 |
Pagination | 1060 - 1068 |
Date Published | 10/2006 |
ISSN | 1057-7157 |
DOI | 10.1109/JMEMS.2006.880352 |
Short Title | J. Microelectromech. Syst. |