Miniature Photoacoustic Imaging Probe Using MEMS Scanning Micromirror

TitleMiniature Photoacoustic Imaging Probe Using MEMS Scanning Micromirror
Publication TypeConference Paper
Year of Publication2011
AuthorsLiao, W., W. Liu, L. Xi, J. Sun, Y. Zhu, L. Wu, H. Jiang, and H. Xie
Conference NameIEEE Optical MEMS and Nanophotonics
Date Published08/2011
Conference LocationIstanbul, Turkey
KeywordsMicromirror; Electrothermal; Bimorph; Tip-tilt piston; Photoacoustic imaging

This paper presents the design and characterization of an electrothermally actuated high-fill-factor tip-tilt-piston (TTP) micromirror and its application to three-dimensional (3D) photoacoustic imaging (PAI). The micromirror chip is 2mm*2mm.  It has large scan range at low driving voltage and can perform fast raster scanning. A miniature PAI probe with a diameter of 11.5 mm has been developed. The 3D images of in vivo human blood vessels are successfully obtained using this MEMS-based PAI system.