|Miniature Photoacoustic Imaging Probe Using MEMS Scanning Micromirror
|Year of Publication
|Liao, W., W. Liu, L. Xi, J. Sun, Y. Zhu, L. Wu, H. Jiang, and H. Xie
|IEEE Optical MEMS and Nanophotonics
|Micromirror; Electrothermal; Bimorph; Tip-tilt piston; Photoacoustic imaging
This paper presents the design and characterization of an electrothermally actuated high-fill-factor tip-tilt-piston (TTP) micromirror and its application to three-dimensional (3D) photoacoustic imaging (PAI). The micromirror chip is 2mm*2mm. It has large scan range at low driving voltage and can perform fast raster scanning. A miniature PAI probe with a diameter of 11.5 mm has been developed. The 3D images of in vivo human blood vessels are successfully obtained using this MEMS-based PAI system.