| Title | Dispense and self planarization process on a modified surface for multiple height 3-D microfabrication |
| Publication Type | Conference Paper |
| Year of Publication | 2011 |
| Authors | Kim, J., PF. Jao, C. Kim, and Y.K. Yoon |
| Conference Name | The 16th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers’11) |
| Date Published | 06/2011 |
| Conference Location | Beijing, China |
| Full Text | <br /> |
