Dispense and self planarization process on a modified surface for multiple height 3-D microfabrication

TitleDispense and self planarization process on a modified surface for multiple height 3-D microfabrication
Publication TypeConference Paper
Year of Publication2011
AuthorsKim, J., PF. Jao, C. Kim, and Y.K. Yoon
Conference NameThe 16th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers’11)
Date Published06/2011
Conference LocationBeijing, China
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