| Title | Fabrication of multiple height microstructures using UV lithography on timed-development-and-thermal-reflowed photoresist |
| Publication Type | Conference Paper |
| Year of Publication | 2010 |
| Authors | Kim, J., K. Lee, H. Jee, K. W. Oh, and Y.K. Yoon |
| Conference Name | International Conference of IEEE Micro Electro Mechanical Systems |
| Date Published | 01/2010 |
| Conference Location | Hong Kong China |
